LS Series

R&D Systems for Large Substrate Feasibility Studies

Processing of Large Substrates Formats with ease

LS 7000 Systems are available as R&D-tool with manual handling for various applications such as spray coating, puddle – or spray developing, bake processes  and feasibility studies. This system has the capability to process substrates up to 1000mm in size.

LS 7000 Coater

System Features

  • Supports substrate up to 1000mm in size
  • Binary nozzles for spray coating of positive resists, polyimides and PBOs
  • Developer systems for positive resist and photosensitive polyimides and PBOs
  • System footprint 2.0m x 2.5m (manual tool module)
  • SECS/GEM interface
  • Customer specific solutions
PreviousNext
12

Located

Dellach 207
9772 Dellach im Drautal
Austria – Europe

Phone

+43 4242 30848

FAX

+43 4242 30848-10