2-axis Handling System of automated loading of foils into the process chamber
Located
Technologiepark Villach
Europastrasse 8
9524 Villach
Austria – Europe
Phone
+43 4242 30848
FAX
+43 4242 30848-10
LS Processors for Foils and flexible Substrates
LS Processors for Foils offer maximal flexibility for process applications such as spray development, spray etching, and lift-off-processes in combination with high variability of substrates, including foils and flexible substrates (glass, ceramic, plastic, and others). Substrates are automatically loaded into the process station using a sophisticated transfer system. Further process options such as recycling and heating of process media, high-pressure applications, and others can be integrated.
System Features
Handling System
- 2-axis handling system of automated loading of foils into the process chamber
- Customer-specific foil types and sizes up to 400×400 mm (thickness >=50µm)
- Minimal contact area, only 5mm at the edge of the foil
- No backside contamination during foil handling
- Fast and safe transfer of foils to the process chamber
Special Chuck for Foils
- Dedicated chuck design for foils
- Customer-specific foil types and sizes up to 400mm x 400mm (thickness >=50µm)
- Special chuck design for foils
- Full area vacuum holding with controlled vacuum
- Automated chuck cleaning function
- Safe holding of foils on chuck at high spin speeds, up to 4000rpm
