High Throughput, batch processing HMDS Vapor Priming System

The LS HMDS Vapor Priming System is designed for high throughput. It can process two cassettes each for 25 wafers with a size up to 200mm diameter at one run. Wafers are primed in saturated HMDS vapor. The number of cassettes is automatically detected and registered for batch monitoring.

System Features

  • High Throughput
  • Explosion Protection
  • Safety precautions
  • Leakage detection
  • Integrated HMDS evaporator with controlled N2 flow
  • Control of HMDS concentration
  • Controlled HMDS exhaust
  • Drain valve for the HMDS tank
  • SECS/GEM interface