LS HMDS Vapor Priming System

High Throughput, batch processing HMDS Vapor Priming System

The LS HMDS Vapor Priming System is designed for high throughput. It can process two cassettes each for 25 wafers with a size up to 200mm diameter at one run. Wafers are primed in saturated HMDS vapor. The number of cassettes is automatically detected and registered for batch monitoring.

System Features

  • High Throughput
  • Explosion Protection
  • Safety precautions
  • Leakage detection
  • Integrated HMDS evaporator with controlled N2 flow
  • Control of HMDS concentration
  • Controlled HMDS exhaust
  • Drain valve for the HMDS tank
  • SECS/GEM interface

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LS Series

Located

Dellach 207
9772 Dellach im Drautal
Austria – Europe

Phone

+43 4242 30848

FAX

+43 4242 30848-10