• Over 30 Years Experience in manufacturing of semiconductor equipment

    Spin coater- and developer systems as well as tools for wet etching, cleaning and lift-off processes

  • Our products are innovative and flexible in configuration

    Our systems are modular designed, flexible in configuration and built for customer specific applications.

  • Industrial proven standard components

    We use industry-proven standard components in our systems to ensure high reliability and low service and maintenance costs.

  • INTEGRATED SAFTEY CONCEPT

    We equip all LS tools with a PILZ safety control to comply with the latest machine guidelines.

Our Products and Services

Manufacturing of Semiconductor Equipment

We offer individual solutions for substrate coating and developing based on production and process-related needs of our customers.

Setup and Optimization of Lithographic Processes

We support our customers to set up and optimize their lithographic processes to achieve better results and reduce material required.

Refurbishment of Equipment and Repair of Components

We offer refurbishment and repair services for various semiconductor equipment and components.

Why us

Over 30 Years Experience

in manufacturing of Semiconductor Equipment – especially Coater and Developer Systems.

Service and Support

Based on our experience, we can provide support for process setup and optimization.

Innovative and flexible products

Our modular tool design enables us to configure systems for customer specific applications.

Industrial proven components

We use industrial proven standard components in our systems to ensure high reliability and low service and maintenance costs.

Contact us