Coater, Developer, Hotplate, UV-Exposure, Film Thickness Measurement • LithExx-Systems

Process Modules

Various Process Modules to select from

Standard modules and customer specific process modules you can select from

You can select from a variety of process modules; check the list of standard process modules below.

Please contact us if you have special processing needs, we will try to find a solution.

Process Modules

Coater Module

Optimized bowl design with symmetric exhaust for optimal process results
Programmable Edge Bead Removal, wafer backside and bowl rinse
Dispense system for up to 5 different media per bowl with automatic nozzle change
Range of resist pumps to choose from:
» customer-specific
» pressure tank
» stepper-motor driven pump
» syringe
Spin- and Spray coating

Developer Module

Proven process bowl design with symmetric exhaust
Dispense system for up to 5 different media per bowl with automatic nozzle change
Various developer media can be applied by:
» Puddle nozzle
» Fan spray nozzle
» Binary spray nozzle
Programmable top-, backside & bowl rinse

Hot- and Coolplate Module

Standard hotplate (60°C – 200°C)
High-temperature hotplate (60°C – 450°C)
HMDS Priming hotplate (60°C – 200°C)
Coolplate (10°C – 60°C), with either water or Peltier cooling
Distance control via
» programmable proximity
» fixed proximity
» vacuum contact

UV Exposure Module

Maintenance-free LED light source
Intensity and exposure time programmable
Optimized for low power consumption and long lifetime
Various wavelengths available

High Pressure Cleaning Module/Lift-Off Module

Special process chamber design for high-pressure application
High-pressure nozzle mounted on servo-motor driven dispense arm
Movement speed and length of the nozzle (x) programmable
Nozzle height (z) adjustable
High-pressure pump for aqueous media (cleaning module) or solvents (lift-off module)
Pressure adjustable up to 180bar
Programmable top-, backside – and process chamber rinse
Exhaust control

Film Thickness Measurement Module

Servo-motor driven chuck with substrate holder for various substrate sizes
Servo-motor controlled arm with holder for measurement sensor
Freely programmable measurement routine
Film thickness measurements with high sampling rate (up to 50.000Hz)
Different measurement techniques for various applications available
LS Software for film thickness measurement incl. data analysis and data storage

Located

Dellach 207
9772 Dellach im Drautal
Austria – Europe

E-Mail

office@lithexx-systems.com

Phone

+43 4242 30848

FAX

+43 4242 30848-10