Austria – Europe
We provide various process modules you can select from. The modules can be built into Laboratory Tools or combined in our Semi- or Fully-Automatic Substrate Processing Systems.
LS Series tools are fully-featured, fully automated Coater-, Developer or Cleaning Systems. The LS Series offers the greatest flexibility in configuration and selectable options.
The LS Alpha Series has fewer options than the LS Series but offers production-proven processes at a reduced price.
High Throughput, batch processing HMDS Priming System.
Developers, Etch- and Lift-Off tools specially designed for foil processing.