Located
Technologiepark Villach
Europastrasse 8
9524 Villach
Austria – Europe
Phone
+43 4242 30848
FAX
+43 4242 30848-10
Process Modules
We provide various process modules you can select from. The modules can be built into Laboratory Tools or combined in our Semi- or Fully-Automatic Substrate Processing Systems.
LS Series
LS Series tools are fully-featured, fully automated Coater-, Developer or Cleaning Systems. The LS Series offers the greatest flexibility in configuration and selectable options.
LS Alpha Series
The LS Alpha Series has fewer options than the LS Series but offers production-proven processes at a reduced price.
LS HMDS Vapor Priming System
High Throughput, batch processing HMDS Priming System.
LS Series for Foil Processing
Developers, Etch- and Lift-Off tools specially designed for foil processing.