We build Coater and Developer systems and fully customized tools according to your production needs

Coater/Developer Systems

LS Series

Full featured, fully automated Coater- and Developer Systems

LS Alpha Series

Cost-optimized Coater- and Developer systems for uncritical process applications

Customized Systems

We offer individual solutions e.g. for substrate coating, developing, cleaning, etc. based on production and process-related needs of our customers. e.g. an HMDS Batch Processing Priming Tool.

LS HMDS Priming Tool

High Throughput, batch processing HMDS-Priming System