Coater- and Developer systems and fully customized tools

Process Modules

We provide various process modules you can select from. The modules can be built into Laboratory Tools or combined in our Semi- or Fully-Automatic Substrate Processing Systems.

LS Series

LS Series tools are fully-featured, fully automated Coater-, Developer or Cleaning Systems. The LS Series offers the greatest flexibility in configuration and selectable options.

LS Alpha Series

The LS Alpha Series has fewer options than the LS Series but offers production-proven processes at a reduced price.

LS HMDS Vapor Priming System

High Throughput, batch processing HMDS Priming System.

LS Series for Foil Processing

Developers, Etch- and Lift-Off tools specially designed for foil processing.