High Throughput, batch processing HMDS-Priming System

System Features

  • High Throughput
  • Explosion Protection
  • Safety precautions
  • Leakage detection
  • Integrated HMDS evaporator with controlled N2 flow
  • Control of HMDS concentration
  • Controlled HMDS exhaust
  • Drain valve for the HMDS tank
  • SECS/GEM interface