Cost-Optimized Coater and Developer Systems

LS Alpha Series

Cost-optimized systems for uncritical process applications

Different process modules allow tool configurations for various process applications – such as coating, developing, bake processes.

If you look for a cost-optimized tool for your production needs and you don’t need the flexibility and various options offered by the LS Series Systems, the LS Alpha Series is the right solution for you.

System Features

Flexible configuration with up to 4 process modules and 4 I/O stations
Wafer sizes up to 200mm diameter
Various process options
Small footprint 1.4m x 1.6m

High throughput – up to 120 Wafer/h
User friendly software
SECS/GEM interface

Handling System

3-axis Pick & place robot
OCR, bar, and matrix code support
Edge gripping of wafers available
Intelligent cassette slot scanning detects carrier type, wafer size, and double or cross-loaded slots

Coater Module

Optimized bowl design with symmetric exhaust for optimal process results
Programmable EBR (Edge Bead Removal), wafer backside and bowl rinse and EBR
Dispense system for up to 2 different media per bowl with automatic nozzle change
Range of resist pumps to choose from:
» customer-specific
» pressure tank
» stepper-motor driven pump